Experimental Determination of the Global Warming Potential of Carbonyl Fluoride (COF2)
Dongkyum Kim,Hyeon Ki Park,and Jeongsoon Lee
Dongkyum Kim
Semiconductor and Display Metrology Group, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea
Hyeon Ki Park
Sole Materials, 62, Hugi-gil, Ochang-eup, Cheongwon-gu, Cheongju-si, 28105, Korea
Semiconductor and Display Metrology Group, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea
Science of Measurement, University of Science and Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea
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This study presents the global warming potential (GWP) of carbonyl fluoride (COF2) by measuring the infrared absorption cross section (ACS) and atmospheric lifetime of COF2 under selected atmospheric conditions. The results showed that COF2 has a much lower global warming potential than conventional fluorinated gases. Thus, it validates the use of COF2 as a sustainable alternative for reducing the climate impact of semiconductor and display manufacturing processes.
This study presents the global warming potential (GWP) of carbonyl fluoride (COF2) by measuring...