Articles | Volume 26, issue 4
https://doi.org/10.5194/acp-26-2707-2026
https://doi.org/10.5194/acp-26-2707-2026
Research article
 | 
20 Feb 2026
Research article |  | 20 Feb 2026

Experimental Determination of the Global Warming Potential of Carbonyl Fluoride (COF2)

Dongkyum Kim, Hyeon Ki Park, and Jeongsoon Lee

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Short summary
This study presents the global warming potential (GWP) of carbonyl fluoride (COF2) by measuring the infrared absorption cross section (ACS) and atmospheric lifetime of COF2 under selected atmospheric conditions. The results showed that COF2 has a much lower global warming potential than conventional fluorinated gases. Thus, it validates the use of COF2 as a sustainable alternative for reducing the climate impact of semiconductor and display manufacturing processes.
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